Due to the complexity of the external environment, it is not easy to realize the actual cleanliness of Fab. The main sources of contamination are particles, metal elements and organic matter from personnel activities. Particles and metal elements from equipment operation. Particles, metal elements and organic matter from raw and auxiliary materials. Particles of oxidized organic matter from operating methods. And particles from the workshop environment. Of these, particulate matter accounts for about 37-70%, liquid particles for about 10-30%, and microorganisms for about 5-20%.
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